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有哪些不同类型的真空泵

真空的基本定义

真空泵用于降低一定体积内的气体压力,进而降低气体密度(参见方程式 1.5)。因此,要考虑需要从腔体中抽除的气体粒子。 

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(1.5)

真空泵的分类

a) 用于通过一个或多个压缩级,将空气粒子从被抽容器中抽出,然后将其排放到大气中的真空泵(压缩泵)。通过移位或动量传输的方式抽气。 

b) 用于让被抽的气体粒子凝结到某个固体表面,或者以其他方式(例如化学方式)将气体粒子束缚到某个固体表面上的真空泵,该固体表面通常是构成泵本身的边界。 

真空泵的类型

作为能更好地反映新技术和实际应用的分类方法,真空泵可以分为以下五类,其中前三种类别属于压缩泵,其余两种类别属于冷凝和吸气泵: 

  1. 通过周期性地增加和减少泵室容积进行工作的泵(旋转叶片泵和滑阀泵;以及摆线泵) 
  2. 将气体从低压侧输送到高压侧而无需改变泵室容积的泵(罗茨泵涡轮分子泵) 
  3. 抽气主要靠气体扩散到无气体高速蒸汽喷嘴的泵(蒸汽流泵) 
  4. 通过冷凝作用(冷凝器)抽蒸汽的泵,以及在极低温度下通过冷凝作用抽永久气体的泵(低温泵) 
  5. 通过吸附或吸收将气体束缚到基本无气体的表面或使气体嵌入表面之中的泵(吸附泵)。

    表 2.1 中的图表给出了这些真空泵类别的调查数据。

表 2.1 真空泵的分类

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