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Glass Coating

镀膜应用

从机械组件上的耐磨层,到光学组件的镀膜或塑料表面金属化,大多镀膜工艺都在真空条件下进行。

真空镀膜解决方案

真空镀膜是将高性能涂层添加到各种产品表面的有效方法之一,可以为客户提高产品价值。真空镀膜属于不断发展的高科技领域,Leybold 莱宝的解决方案在这一领域树立了标杆。

真空镀膜应用广泛,例如:

  1. Low-E 玻璃镀膜可反射太阳能量,同时保持 100% 透明。Low-E 镀膜是一种节能产品,有助于降低能耗。
  2. 建筑玻璃上的镀膜可通过透明的光立面增加现代摩天大楼的美观性,同时保留 low-E 玻璃的特性。
  3. 耐磨的硬镀膜可改善切削刀具的高速切削。
  4. 太阳能电池板、显示屏和触摸屏传感器生产中用到功能性镀膜,可使现代器件能够不断发展和提高质量。
  5. 特殊光学镀膜可用于制造光学滤光片、透镜、反射表面和抗反射表面。
  6. 装饰性镀膜,比如高反射镀膜,可用于形成部件和产品的奢华表面。

真空镀膜市场的需求不断推动 Leybold 莱宝提供优化的产品和客户特定的真空解决方案,包括前级真空泵、高真空泵、真空控制装置、真空测量设备和检漏系统。

Leybold 莱宝真空泵和解决方案提供

Increased performance of vacuum systems, including increased operational uptimes and decreased downtimes

Predictable and intuitive maintenance using IoT technology

Optimized product design for environmentally-friendly operation

A transparent operating cost structure with efficient energy consumption

Perfect alignment with reliable production operations in 24/7 environments

“Green” thinking and a CO2 reduction concept lays behind the engineering idea for each new product

与镀膜应用相关的产品

DRYVAC

DRYVAC

A modern cost and energy-efficient family of dry screw-type vacuum pumps with unprecedented robustness. DRYVAC can handle repeated shock-venting during load-locking in addition to high dust gas loads during the sputtering process. DRYVAC pumps represent the “next generation” of fore vacuum pumps and are already an industry standard. Their features align well with today’s market requirements, since they're designed for green, environmentally-friendly operation and offer a convenient and transparent service plan.

DRYVAC PowerBoost

DRYVAC PowerBoost

Sometimes you need a fully-integrated solution - for example, load locks for inline coaters requiring powerful bursts of energy. DRYVAC PowerBoost is a combination of a DRYVAC and RUVAC booster pump with an intelligent electronic module. This system automatically adapts the RUVAC booster pump’s performance to result in shorter cycle times and lower energy consumption. For clean room environments (TFT, SEMI and FPD), DRYVAC PowerBoost offers the best possible performance at the lowest environmental footprint.

RUVAC

RUVAC

Pumping large volumes requires a high-performing booster pump. Our classic booster pumps RUVAC WA(U) and WS(U) and also our innovative, hermetically tight RUVAC WH(U) can either work with a direct drive or, they can be driven by a frequency converter that allows them to run with higher rotation and pumping speed on a continuous basis.
With a capacity of 250 to 7000 m³/h, we can design vacuum coating systems of all sizes.

SOGEVAC

SOGEVAC

The SOGEVAC rotary vane pump family is a time-proven fore-vacuum pump used in coating applications. Since several decades, oil-sealed SOGEVAC pumps are the top choice of customers looking for reliable vacuum pumps with the best reputation for coating applications. You’ll typically find SOGEVAC pumps in systems combined with RUVAC Roots blowers. The SOGEVAC family is available in a wide range of pumping speeds, from 16 m³/h to 750 m³/h, which enables to use this pump family in conjunction with small table-top sputtering systems for large industrial sputtering machines.

TURBOVAC MAGiNTEGRA

TURBOVAC MAG

TURBOVAC MAGiNTEGRA magnetic-levitated turbo molecular vacuum pumps are production-proven high vacuum pumps that generate a hydrocarbon-free vacuum for challenging applications. Thanks to their robustness, particles generated in the coating process can be tolerated just like high gas flows which appear in some coating applications for industrial production scales. The TURBOVAC MAGiNTEGRA pump is our most suitable solution for high vacuum in sputtering systems. These pumps offer low maintenance costs and high performance when it comes to pumping speed-size-throughput. Do you require a high vacuum pump for larger area coating applications? TURBOVAC MAGiNTEGRA is your go-to solution.

TURBOVAC i

TURBOVAC i/iX

The TURBOVAC i family is a range of mechanical turbo molecular vacuum pumps offers various models optimized for industrial applications. Thanks to their special design, our robust TURBOVAC i IND version is best suited for tolerating particles generated in the coating process or the high gas flows needed in certain coating applications from small to mid-sized vacuum chambers.

Diffusion pumps

扩散泵

High-vacuum diffusion pumps are versatile enough for many applications, but they’re particularly useful for decorative coatings, wear protection treatments and roll-to-roll coatings. Our robust and cost-effective diffusion pumps of the DIP and DIJ range offer the lowest price-for-pumping speeds for any application requiring high vacuum.

COOLVAC

COOLVAC

High vacuum pump family for get humidity and oil free vacuum with lowest ultimate pressure down to 10-9 mbar. Optic layers need to be pure as much as possible to get right properties – so if purity of vacuum system is play core role then COOLVAC is right choice.

Vacuum gauges

真空计

Stable vacuum pressure is essential for consistently high-quality coatings. Depending on the process, the vacuum level and the accuracy required, various gauges are used to monitor or even control the vacuum level. From TTR91 or TTR101 gauges for rough vacuum to ITR90 for high vacuum levels, we offer a full line of gauges to meet your processing needs. For vacuum coating processes it is important to achieve an exact pressure during sputtering and a low ultimate pressure. In certain high-precision sputtering processes, the accuracy of measuring pressure plays a vital role. We have developed our own family of vacuum gauges that offer a measurement and control system for all sizes and all accuracy levels.

Leak detection

检漏

A tight vacuum system is a prerequisite for a stable coating process, ensuring a uniform product quality. Therefore, coating systems are leak tested with our PHOENIX rang of helium leak detectors. The range includes both wet and dry solutions and mobile and cart-mounted systems.

Vacuum fittings and valves

真空配件和阀门

A vacuum system isn’t complete without special vacuum-tights parts, fittings and valves. All our accessories, from valves, sealing, piping and hoses fit perfectly with our pumps and comply with all world standards, such as ISO-K and ISO-CF.

DRYVAC

A modern cost and energy-efficient family of dry screw-type vacuum pumps with unprecedented robustness. DRYVAC can handle repeated shock-venting during load-locking in addition to high dust gas loads during the sputtering process. DRYVAC pumps represent the “next generation” of fore vacuum pumps and are already an industry standard. Their features align well with today’s market requirements, since they're designed for green, environmentally-friendly operation and offer a convenient and transparent service plan.

DRYVAC PowerBoost

Sometimes you need a fully-integrated solution - for example, load locks for inline coaters requiring powerful bursts of energy. DRYVAC PowerBoost is a combination of a DRYVAC and RUVAC booster pump with an intelligent electronic module. This system automatically adapts the RUVAC booster pump’s performance to result in shorter cycle times and lower energy consumption. For clean room environments (TFT, SEMI and FPD), DRYVAC PowerBoost offers the best possible performance at the lowest environmental footprint.

RUVAC

Pumping large volumes requires a high-performing booster pump. Our classic booster pumps RUVAC WA(U) and WS(U) and also our innovative, hermetically tight RUVAC WH(U) can either work with a direct drive or, they can be driven by a frequency converter that allows them to run with higher rotation and pumping speed on a continuous basis.
With a capacity of 250 to 7000 m³/h, we can design vacuum coating systems of all sizes.

SOGEVAC

The SOGEVAC rotary vane pump family is a time-proven fore-vacuum pump used in coating applications. Since several decades, oil-sealed SOGEVAC pumps are the top choice of customers looking for reliable vacuum pumps with the best reputation for coating applications. You’ll typically find SOGEVAC pumps in systems combined with RUVAC Roots blowers. The SOGEVAC family is available in a wide range of pumping speeds, from 16 m³/h to 750 m³/h, which enables to use this pump family in conjunction with small table-top sputtering systems for large industrial sputtering machines.

TURBOVAC MAG

TURBOVAC MAGiNTEGRA magnetic-levitated turbo molecular vacuum pumps are production-proven high vacuum pumps that generate a hydrocarbon-free vacuum for challenging applications. Thanks to their robustness, particles generated in the coating process can be tolerated just like high gas flows which appear in some coating applications for industrial production scales. The TURBOVAC MAGiNTEGRA pump is our most suitable solution for high vacuum in sputtering systems. These pumps offer low maintenance costs and high performance when it comes to pumping speed-size-throughput. Do you require a high vacuum pump for larger area coating applications? TURBOVAC MAGiNTEGRA is your go-to solution.

TURBOVAC i/iX

The TURBOVAC i family is a range of mechanical turbo molecular vacuum pumps offers various models optimized for industrial applications. Thanks to their special design, our robust TURBOVAC i IND version is best suited for tolerating particles generated in the coating process or the high gas flows needed in certain coating applications from small to mid-sized vacuum chambers.

扩散泵

High-vacuum diffusion pumps are versatile enough for many applications, but they’re particularly useful for decorative coatings, wear protection treatments and roll-to-roll coatings. Our robust and cost-effective diffusion pumps of the DIP and DIJ range offer the lowest price-for-pumping speeds for any application requiring high vacuum.

COOLVAC

High vacuum pump family for get humidity and oil free vacuum with lowest ultimate pressure down to 10-9 mbar. Optic layers need to be pure as much as possible to get right properties – so if purity of vacuum system is play core role then COOLVAC is right choice.

真空计

Stable vacuum pressure is essential for consistently high-quality coatings. Depending on the process, the vacuum level and the accuracy required, various gauges are used to monitor or even control the vacuum level. From TTR91 or TTR101 gauges for rough vacuum to ITR90 for high vacuum levels, we offer a full line of gauges to meet your processing needs. For vacuum coating processes it is important to achieve an exact pressure during sputtering and a low ultimate pressure. In certain high-precision sputtering processes, the accuracy of measuring pressure plays a vital role. We have developed our own family of vacuum gauges that offer a measurement and control system for all sizes and all accuracy levels.

检漏

A tight vacuum system is a prerequisite for a stable coating process, ensuring a uniform product quality. Therefore, coating systems are leak tested with our PHOENIX rang of helium leak detectors. The range includes both wet and dry solutions and mobile and cart-mounted systems.

真空配件和阀门

A vacuum system isn’t complete without special vacuum-tights parts, fittings and valves. All our accessories, from valves, sealing, piping and hoses fit perfectly with our pumps and comply with all world standards, such as ISO-K and ISO-CF.

Contact Leybold

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我们重视为客户提供当地服务。如有任何疑问,请联系我们。