Turbomolecular Pumps

TURBOVAC MAGiNTEGRA

带磁性转子悬浮功能的涡轮分子泵

耐用,用途广泛,清洁,振动小

专为敏感应用量身定制

  • Coating applications: from the production of glass lenses, medical devices to coating aerospace components and solar panels.
  • Scientific research: its clean, vibration-free operation makes the TURBOVAC MAG series a popular choice in delicate research processes, for example in mass spectrometers or electron microscopes.
  • Industrial applications: reliability and robust performance are critical in maintaining production levels in this sector. The high-level build standard of TURBOVAC MAG pumps, along with the reduced wear-and-tear that these pumps deliver make them ideal for these settings.

TURBOVAC MAG 2807 iS 和 3207 iS

3000 l/s 抽速级别中结构非常紧凑的磁悬浮涡轮泵

With TURBOVAC MAG iS pumps the stator and rotor blades are levitated and held in place by electromagnets rather than oil-lubricating bearing systems. This has a number of benefits inlcuding: 

  • Minimal wear-and-tear reducing maintenance intervals and eleminating the need to replace oil or lubricated bearing cartridges 

  • Significantly reduced levels of noise and vibration. This makes them ideal for sensitive applications that require a clean, dry, hydrocarbon-free vacuum  

  • Impressive performance with pumping speeds up to 3,200 l/s 

But what makes the TURBOVAC MAG iS range stand out from the crowd is their versatility. Weighing in at under 60 kg they are the lightest and most compact pumps in the 3,000 l/s class, and can be mounted in any orientation. This makes them a perfect choice in environments  where space is limited, or flexible deployment is required.  

TURBOVAC MAG 3207 iS - front view

TURBOVAC MAG 2807 iS

TURBOVAC MAGiNTEGRA

兼顾精准、耐用和可靠于一身!

TURBOVAC MAGiNTEGRA系列磁悬浮分子泵可靠耐用,适用于分析、研究和严苛的工业镀膜行业。

  • 高抽吸速度和高抽气量可加快抽气速度,从而缩短设备的循环时间。 
  • 5 轴主动磁浮系统,将高可靠性与安全性相结合。
  • 配置集成的变频器和电源:不再需要传统的机架安装式控制器和电缆。

为了安全起见,在断电的情况下,驱动系统切换至发电机模式,以通过缓慢减速来保持转子悬浮。当电源恢复时,泵开始自动加速至正常速度。

TURBOVAC MAGiNTEGRA 具有 IP 54 防护等级,是在恶劣工业应用环境中使用的理想之选。

磁悬浮分子泵可以在10-1 mbar (0.75 x 10-1 Torr) 至 10-10 mbar (0.75 x 10-10 Torr) 的压力范围内使用。抽速度范围 300 l/s 到 2200 l/s 。

TURBOVAC MAGiNTEGRA 分子泵可以满足如下使用要求:

  • 低噪音和低振动运行, 
  • 无油真空
  • 免维护运行时间长
Turbomolecular Pumps

灵活

这些高真空泵安装在任何方向都能实现高性能运行,并且可以轻松集成到您的真空系统中。

TURBOVAC MAG Integra 体积小,安装简单,能够产生清洁的高真空和超高真空。

它设计灵活,控制器安装在侧面或底部,采用创新的模块化工业通信解决方案,系统集成更容易。

适用于工业应用,比如 PVD、显示、光学和建筑玻璃镀膜。

可靠

TURBOVAC MAGiNTEGRA 对于气体具有高抽速和高压缩比。

对如下影响不敏感:

  • 工艺颗粒和灰尘
  • 气体冲击。

无油,可确保清洁的高真空和超高真空条件。

它集成了复合型和经典型涡轮转子级以及板载变频器和电源。

振动非常小,具有高度的操作可靠性。

免维护

免维护运行时间长达 10000 小时,具有监测和自我保护功能。

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TURBOVAC MAGiNTEGRA

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TURBOVAC MAGiNTEGRA

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