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Vacuum Gauge Calibration System

Calibration systems

Vacuum gauge calibration systems

Process reliability is possible with regular checks, adjustments and recalibration of vacuum gauges and sensors which must be calibrated at regular intervals. Setting the devices to an initial value is an important component of quality assurance. Calibrated gauges are particularly used where high requirements are made on reproducibility and compatibility as well as on the quality of testing processes. Also, if a clear reference is required for lots of existing pressure measurement devices, calibration is a must.

The CS calibration systems from Leybold enable customers to check and calibrate the defined and required measurement accuracy of their vacuum gauges themselves. This can follow the standards of the German Accreditation Body (DAkkS) or any international standard, whereas the required measurement accuracy must be defined by the users.

In this context the term “Calibration” signifies the comparison of measured values taken from the gauge to be calibrated and a so-called “reference gauge or transfer standard”. As a condition, both gauges must be connected to the same vacuum chamber that is designed in line with ISO 3567 regulations. The reference gauge itself (along with the pressure display and connecting cable) must be calibrated against a traceable transfer standard, at least once a year.

Our reference gauges will be certified by comparing against a PTB1) transfer standard by the DAkkS2) calibration service of the Leybold GmbH.

1) PTB - Physikalisch-Technische Bundesanstalt, Berlin (Federal Institute for physics and technology)

2 DAkkS - Deutsche Akkreditierungsstelle (German calibration service)

We have been calibrating all makes of gauges and sensors independently for customers since 1981.

A DAkkS or factory calibration certificate is issued for the calibration process. Devices with inadequate long-term stability or for measurement principles which are unsuitable for calibration cannot be calibrated.

Calibration can be conducted in static or dynamic mode.

  • Static means the calibration chamber is isolated from the pump system and gas is admitted until the desired pressure value is reached. This method requires a low outgassing rate, which is achieved by a clean calibration chamber and an extensive pumping time.
  • Using dynamic calibration, the chamber pressure is adjusted by means of a gas dosing valve and a throttling valve on the turbo-molecular pump intake. The inlet gas quantity is manually balanced with the pumped gas flow to set a stable pressure.

CS 3

  • Vacuum gauges and measurement systems of any make may be calibrated
  • Designed in accordance with ISO 3567
  • Transfer standards with PTB-, DAkkS- or factory certificate
  • Easier DIN / ISO 9000 approval
  • Reliable and reproducible measurements
  • Quick start-up
  • Measurement system free of hydrocarbons through the utilization of dry compressing vacuum pumps
  • Simple operation
  • CE approval

The base unit of the CS 3 mainly consists of a stainless-steel calibration chamber (design in accordance with ISO 3567) with three calibration ports and a dry compressing Turbo-molecular pump system TURBOLAB 90. For pressure setting a manual gas dosing valve is used in combination with a butterfly valve for throttling the suction speed. A full range high vacuum gauge is fitted to display the complete pressure range of the sensors to calibrate and the system's ultimate pressure. As per ISO 3567 this ultimate pressure must be at least 10% of the minimum calibration pressure.

For gauge comparison, the CS 3 comes with two or three reference transmitters CERAVAC CTR 100 N (or CTR 101 N for improved accuracy), a display device GRAPHIX THREE and the corresponding connection cables. All together they are calibrated at our own calibration lab, in line with latest DAkkS-regulations.

Calibration system CS3 - half side left

CS 7

  • Customized product for serving calibration ranges from 1000 mbar (Torr) down to 1 x 10-7 mbar (Torr).
  • Usually used at research institutes or calibration labs.
  • Checking the characteristics of vacuum gauges
  • Precise calibration of vacuum gauges in accordance with DAkkS (national accreditation body for the Federal Republic of Germany) or other international standards
  • Ensure reproducible parameters
  • Simple to operate calibration systems
  • Chamber, turbomolecular pump system, vacuum gauges and additional components depending on the calibration pressure
Vacuum Gauge Calibration System
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